TEM study on the electrical discharge machined surface of single-crystal silicon

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TEM study on the electrical discharge machined surface of single-crystal silicon

EDM is a useful process for machining high-aspect ratio features with good accuracy in electrically conductive materials irrespective of their mechanical properties. With the ability of micro-EDM to compete with the resolution of conventional semi-conductor processing techniques, the process has att...

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Bibliographic Details
Main Authors:	Murray, J.W., Fay, M.W., Kunieda, M., Clare, A.T.
Format:	Article
Published:	Elsevier 2013
Subjects:	EDM Single crystal silicon TEM Raman Deposition Recast layer
Online Access:	https://eprints.nottingham.ac.uk/2561/

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