TEM study on the electrical discharge machined surface of single-crystal silicon
EDM is a useful process for machining high-aspect ratio features with good accuracy in electrically conductive materials irrespective of their mechanical properties. With the ability of micro-EDM to compete with the resolution of conventional semi-conductor processing techniques, the process has att...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
Elsevier
2013
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| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/2561/ |