Microstructural characterisation of TiAlTiAu and TiAlPdAu ohmic contacts to AlGaN/GaN
Ti/Al/Ti/Au and Ti/Al/Pd/Au contacts to AlGaN/GaN have been investigated to ascertain the effect of annealing temperature on the structural evolution of the contacts. Ti/Al/Ti/Au contacts become ohmic after rapid thermal annealing at 750°C or higher, corresponding to the formation of an interfacial...
| Main Authors: | , , , , , , |
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| Other Authors: | |
| Format: | Book Section |
| Published: |
IOP Publishing Ltd
2001
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| Subjects: | |
| Online Access: | https://eprints.nottingham.ac.uk/1468/ |