Vibration transmission and support loss in MEMS sensors

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Vibration transmission and support loss in MEMS sensors

Micro-Electro-Mechanical Systems (MEMS) inertial sensors that are based on a resonating structure are used in a wide range of applications including inertial guidance and automotive safety systems. Damping has a significant and negative effect on sensor performance and there is an increasing need to...

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Bibliographic Details
Main Author:	Chouvion, Benjamin
Format:	Thesis (University of Nottingham only)
Language:	English
Published:	2010
Online Access:	https://eprints.nottingham.ac.uk/11293/

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