Vibration transmission and support loss in MEMS sensors
Micro-Electro-Mechanical Systems (MEMS) inertial sensors that are based on a resonating structure are used in a wide range of applications including inertial guidance and automotive safety systems. Damping has a significant and negative effect on sensor performance and there is an increasing need to...
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| Format: | Thesis (University of Nottingham only) |
| Language: | English |
| Published: |
2010
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| Online Access: | https://eprints.nottingham.ac.uk/11293/ |