Optical measurement of ultra fine linewidths using artificial neural networks

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Optical measurement of ultra fine linewidths using artificial neural networks

Measuring fine track widths with optical instruments has become increasingly difficult as the dimensions of the features of interest have become smaller than the traditional optical resolution limit. This has caused a move to non-optical methods such as scanning electron and atomic force microscopy...

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Bibliographic Details
Main Author:	Smith, Richard
Format:	Thesis (University of Nottingham only)
Language:	English
Published:	2006
Subjects:	Artificial Neural Network interferometer line-width measurement
Online Access:	https://eprints.nottingham.ac.uk/10418/

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