Optical measurement of ultra fine linewidths using artificial neural networks
Measuring fine track widths with optical instruments has become increasingly difficult as the dimensions of the features of interest have become smaller than the traditional optical resolution limit. This has caused a move to non-optical methods such as scanning electron and atomic force microscopy...
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| Format: | Thesis (University of Nottingham only) |
| Language: | English |
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2006
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| Online Access: | https://eprints.nottingham.ac.uk/10418/ |