Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers

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Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers

In microelectronics, cost reduction and improved performance requires device miniaturization in the ultra large scale integration (ULSI) chip. The consequence is that minute structural defects and contamination, not previously considered, on the silicon wafer become increasingly critical to the devi...

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Bibliographic Details
Main Author:	Lee , Wah Pheng
Format:	Thesis
Published:	2005
Subjects:	TK7800-8360 Electronics
Online Access:	http://shdl.mmu.edu.my/856/

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