Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers
In microelectronics, cost reduction and improved performance requires device miniaturization in the ultra large scale integration (ULSI) chip. The consequence is that minute structural defects and contamination, not previously considered, on the silicon wafer become increasingly critical to the devi...
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| Format: | Thesis |
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2005
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| Online Access: | http://shdl.mmu.edu.my/856/ |