Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers
In microelectronics, cost reduction and improved performance requires device miniaturization in the ultra large scale integration (ULSI) chip. The consequence is that minute structural defects and contamination, not previously considered, on the silicon wafer become increasingly critical to the devi...
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| Format: | Thesis |
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2005
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| Online Access: | http://shdl.mmu.edu.my/856/ |
| _version_ | 1848789621058568192 |
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| author | Lee , Wah Pheng |
| author_facet | Lee , Wah Pheng |
| author_sort | Lee , Wah Pheng |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | In microelectronics, cost reduction and improved performance requires device miniaturization in the ultra large scale integration (ULSI) chip. The consequence is that minute structural defects and contamination, not previously considered, on the silicon wafer become increasingly critical to the device reliability and manufacturing yield. While the contamination may be removed from the silicon surface by wet cleaning, the grown-in defects will not be cleaned. The latter includes the truncated voids which appear as pits on the polished surface, and are often known as the crystal-originated "particles" (COPs). |
| first_indexed | 2025-11-14T17:59:37Z |
| format | Thesis |
| id | mmu-856 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T17:59:37Z |
| publishDate | 2005 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-8562010-07-06T04:11:54Z http://shdl.mmu.edu.my/856/ Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers Lee , Wah Pheng TK7800-8360 Electronics In microelectronics, cost reduction and improved performance requires device miniaturization in the ultra large scale integration (ULSI) chip. The consequence is that minute structural defects and contamination, not previously considered, on the silicon wafer become increasingly critical to the device reliability and manufacturing yield. While the contamination may be removed from the silicon surface by wet cleaning, the grown-in defects will not be cleaned. The latter includes the truncated voids which appear as pits on the polished surface, and are often known as the crystal-originated "particles" (COPs). 2005-07 Thesis NonPeerReviewed Lee , Wah Pheng (2005) Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers. PhD thesis, Multimedia University. http://myto.perpun.net.my/metoalogin/logina.php |
| spellingShingle | TK7800-8360 Electronics Lee , Wah Pheng Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers |
| title | Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers |
| title_full | Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers |
| title_fullStr | Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers |
| title_full_unstemmed | Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers |
| title_short | Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers |
| title_sort | optical scattering detection and characterisation of crystal originated particles in czochralski-grown silicon wafers |
| topic | TK7800-8360 Electronics |
| url | http://shdl.mmu.edu.my/856/ http://shdl.mmu.edu.my/856/ |