Nanosecond laser ablation and deposition of silicon
Nanosecond-pulsed KrF (248 nm, 25 ns) and Nd:YAG (1064 nm, 532 nm, 355 nm, 5 ns) lasers were used to ablate a polycrystalline Si target in a background pressure of < 10(-4) Pa. Si films were deposited on Si and GaAs substrates at room temperature. The surface morphology of the films was character...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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2011
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| Online Access: | http://shdl.mmu.edu.my/3366/ http://shdl.mmu.edu.my/3366/1/34.pdf |
| _version_ | 1848790308740923392 |
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| author | Siew, Wee Ong Yap, Seong Shan Ladam, Cécile Dahl, Øystein Reenaas, Turid Worren Tou, Teck Yong |
| author_facet | Siew, Wee Ong Yap, Seong Shan Ladam, Cécile Dahl, Øystein Reenaas, Turid Worren Tou, Teck Yong |
| author_sort | Siew, Wee Ong |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | Nanosecond-pulsed KrF (248 nm, 25 ns) and Nd:YAG (1064 nm, 532 nm, 355 nm, 5 ns) lasers were used to ablate a polycrystalline Si target in a background pressure of < 10(-4) Pa. Si films were deposited on Si and GaAs substrates at room temperature. The surface morphology of the films was characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Round droplets from 20 nm to 5 mu m were detected on the deposited films. Raman Spectroscopy indicated that the micron-sized droplets were crystalline and the films were amorphous. The dependence of the properties of the films on laser wavelengths and fluence is discussed. |
| first_indexed | 2025-11-14T18:10:33Z |
| format | Article |
| id | mmu-3366 |
| institution | Multimedia University |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T18:10:33Z |
| publishDate | 2011 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-33662014-03-05T02:47:00Z http://shdl.mmu.edu.my/3366/ Nanosecond laser ablation and deposition of silicon Siew, Wee Ong Yap, Seong Shan Ladam, Cécile Dahl, Øystein Reenaas, Turid Worren Tou, Teck Yong QC Physics Nanosecond-pulsed KrF (248 nm, 25 ns) and Nd:YAG (1064 nm, 532 nm, 355 nm, 5 ns) lasers were used to ablate a polycrystalline Si target in a background pressure of < 10(-4) Pa. Si films were deposited on Si and GaAs substrates at room temperature. The surface morphology of the films was characterized using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Round droplets from 20 nm to 5 mu m were detected on the deposited films. Raman Spectroscopy indicated that the micron-sized droplets were crystalline and the films were amorphous. The dependence of the properties of the films on laser wavelengths and fluence is discussed. 2011-09 Article PeerReviewed text en http://shdl.mmu.edu.my/3366/1/34.pdf Siew, Wee Ong and Yap, Seong Shan and Ladam, Cécile and Dahl, Øystein and Reenaas, Turid Worren and Tou, Teck Yong (2011) Nanosecond laser ablation and deposition of silicon. Applied Physics A, 104 (3). pp. 877-881. ISSN 0947-8396 http://dx.doi.org/10.1007/s00339-011-6430-0 doi:10.1007/s00339-011-6430-0 doi:10.1007/s00339-011-6430-0 |
| spellingShingle | QC Physics Siew, Wee Ong Yap, Seong Shan Ladam, Cécile Dahl, Øystein Reenaas, Turid Worren Tou, Teck Yong Nanosecond laser ablation and deposition of silicon |
| title | Nanosecond laser ablation and deposition of silicon |
| title_full | Nanosecond laser ablation and deposition of silicon |
| title_fullStr | Nanosecond laser ablation and deposition of silicon |
| title_full_unstemmed | Nanosecond laser ablation and deposition of silicon |
| title_short | Nanosecond laser ablation and deposition of silicon |
| title_sort | nanosecond laser ablation and deposition of silicon |
| topic | QC Physics |
| url | http://shdl.mmu.edu.my/3366/ http://shdl.mmu.edu.my/3366/ http://shdl.mmu.edu.my/3366/ http://shdl.mmu.edu.my/3366/1/34.pdf |