Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer
Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/3185/ |
| _version_ | 1848790257646960640 |
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| author | Mohd-Yasin, F. Nagel, D. J. Korman, C. E. Ong, D. S. Chuah, H. T. |
| author_facet | Mohd-Yasin, F. Nagel, D. J. Korman, C. E. Ong, D. S. Chuah, H. T. |
| author_sort | Mohd-Yasin, F. |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| first_indexed | 2025-11-14T18:09:45Z |
| format | Conference or Workshop Item |
| id | mmu-3185 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:09:45Z |
| publishDate | 2007 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-31852011-10-07T06:25:29Z http://shdl.mmu.edu.my/3185/ Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer Mohd-Yasin, F. Nagel, D. J. Korman, C. E. Ong, D. S. Chuah, H. T. T Technology (General) QA75.5-76.95 Electronic computers. Computer science Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer 2007-12 Conference or Workshop Item NonPeerReviewed Mohd-Yasin, F. and Nagel, D. J. and Korman, C. E. and Ong, D. S. and Chuah, H. T. (2007) Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer. In: International Semiconductor Device Research Symposium, 12-14 DEC 2007, College Pk, MD. http://apps.webofknowledge.com/full_record.do?product=WOS&search_mode=GeneralSearch&qid=1&SID=W2N@i37pkKLIpi4oEO2&page=120&doc=1200 |
| spellingShingle | T Technology (General) QA75.5-76.95 Electronic computers. Computer science Mohd-Yasin, F. Nagel, D. J. Korman, C. E. Ong, D. S. Chuah, H. T. Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| title | Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| title_full | Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| title_fullStr | Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| title_full_unstemmed | Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| title_short | Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| title_sort | low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer |
| topic | T Technology (General) QA75.5-76.95 Electronic computers. Computer science |
| url | http://shdl.mmu.edu.my/3185/ http://shdl.mmu.edu.my/3185/ |