Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer
Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer
| Main Authors: | , , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/3185/ |