Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer

Low frequency noise measurement of three-axis surface micro-machined silicon capacitive accelerometer

Bibliographic Details
Main Authors: Mohd-Yasin, F., Nagel, D. J., Korman, C. E., Ong, D. S., Chuah, H. T.
Format: Conference or Workshop Item
Published: 2007
Subjects:
Online Access:http://shdl.mmu.edu.my/3185/