Low frequency noise measurement and analysis of capacitive micro-accelerometers: Temperature effect
In this work, a noise measurement of capacitive micro-accelerometers incorporating temperature effect is presented. In the setup, a hot plate is used to heat the device up to temperatures in the 75 degree C range. A thermo couple attached to the enclosure is used to assess its temperature. The data...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2007
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/3169/ |