Low frequency noise measurement and analysis of capacitive micro-accelerometers
Noise measurements of micro-accelerometers were performed using a special measurement system. A common spectral behavior of noise is found, with 1/f noise dominating at low frequencies and white thermal noise being the limiting factor at higher frequencies. Unexpected resonances are also observed in...
| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Elsevier B.V.
2007
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/3058/ |