Prospective development in diffusion barrier layers for copper metallization in LSI
The most recent development together with some challenging opportunities on barrier layers for copper metallization has been reviewed. This review study mainly focuses on the technology trends in interconnect metallization, with emphasis on barrier layer materials, mechanism that dominates diffusion...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
ELSEVIER SCI LTD
2007
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/3050/ http://shdl.mmu.edu.my/3050/1/1073.pdf |