A Study on Central Moments of the Histograms from Scanning Electron Microscope Charging Images

This paper presents a study on using the statistical parameter, central moment, to describe the properties of the histograms of scanning electron microscope (SEM) images. Various charging effects of SEM images and the corresponding histogram profiles are analyzed. The central moment distributions ar...

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Bibliographic Details
Main Authors: Tan, Y. Y., Sim, K. S., Tso, C. P.
Format: Article
Published: JOHN WILEY & SONS INC 2007
Subjects:
Online Access:http://shdl.mmu.edu.my/3018/