Dimension Optimization of a MEMS LC Pressure Sensor

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Dimension Optimization of a MEMS LC Pressure Sensor

In this work, an analytical method is introduced to optimize the structure of a MEMS LC pressure sensor based on the device pressure range, the maximum overload pressure, and other design constraints. The method can be applied to square and circular membrane sensors. The sensitivity of the LC struct...

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Bibliographic Details
Main Authors:	Mohsen, Nabipoor, Burhanuddin Yeop, Majlis
Format:	Conference or Workshop Item
Published:	2008
Subjects:	T Technology (General) QA75.5-76.95 Electronic computers. Computer science
Online Access:	http://shdl.mmu.edu.my/2892/

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