Dimension Optimization of a MEMS LC Pressure Sensor
In this work, an analytical method is introduced to optimize the structure of a MEMS LC pressure sensor based on the device pressure range, the maximum overload pressure, and other design constraints. The method can be applied to square and circular membrane sensors. The sensitivity of the LC struct...
| Main Authors: | , |
|---|---|
| Format: | Conference or Workshop Item |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2892/ |