Pulsed Nd:YAG laser deposition of indium tin oxide thin films in different gases and organic light emitting device applications
The microstructures, electrical and optical properties of indium-doped tin oxide (ITO) films, deposited on glass substrates in different background gases by a pulsed Nd:YAG laser, were characterized. The optimal pressure for obtaining the lowest resistivity in ITO thin film is inversely proportional...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
ELSEVIER SCIENCE SA
2008
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2747/ |