Analysis of Atomic Force Microscopy Images of Crystal Originated “Particles” on Silicon Wafers Treated with NH4OH:H2O2:H2O Solution

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Analysis of Atomic Force Microscopy Images of Crystal Originated “Particles” on Silicon Wafers Treated with NH4OH:H2O2:H2O Solution

Crystal-originated particle (COP) side-wall angles and rates of change in width were measured after treatment in an SC-1 solution by atomic force microscopy (AFM) to determine the shape, size and type of the particles on a polished (100) Si wafer surface. The etched silicon tip's maximum measur...

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Bibliographic Details
Main Authors:	Lee, W. P., Seow, W. S., Yow, H. K., Tou, T. Y.
Format:	Article
Published:	The Japan Society of Applied Physics 2001
Subjects:	QC Physics
Online Access:	http://shdl.mmu.edu.my/2700/

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