Analysis of Atomic Force Microscopy Images of Crystal Originated “Particles” on Silicon Wafers Treated with NH4OH:H2O2:H2O Solution
Crystal-originated particle (COP) side-wall angles and rates of change in width were measured after treatment in an SC-1 solution by atomic force microscopy (AFM) to determine the shape, size and type of the particles on a polished (100) Si wafer surface. The etched silicon tip's maximum measur...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
The Japan Society of Applied Physics
2001
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2700/ |