Effect of shot noise and secondary emission noise in scanning electron microscope images

The effect of shot noise and emission noise due to materials that have different emission properties was simulated. Local variations in emission properties affect the overall signal-to-noise ratio (SNR) value of the scanning electron microscope image. In the case in which emission noise is assumed t...

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Main Authors: Sim,, KS, Phang, , JCH, Thong, , JTL
Format: Article
Published: 2004
Subjects:
Online Access:http://shdl.mmu.edu.my/2505/
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author Sim,, KS
Phang, , JCH
Thong, , JTL
author_facet Sim,, KS
Phang, , JCH
Thong, , JTL
author_sort Sim,, KS
building MMU Institutional Repository
collection Online Access
description The effect of shot noise and emission noise due to materials that have different emission properties was simulated. Local variations in emission properties affect the overall signal-to-noise ratio (SNR) value of the scanning electron microscope image. In the case in which emission noise is assumed to be absent, the image SNRs for silicon and gold on a black background are identical. This is because only shot noise in the primary beam affects the SNRs, irrespective of the assumed noiseless secondary electron emission or backscattered electron emission processes. The addition of secondary emission noise degrades the SNR. Materials with higher secondary electron yield and backscattering electron yield give rise to higher SNR. For images formed from two types of material, the contrast of the image is lower. The reduction in image signal reduces the overall image SNR. As expected, large differences in delta or eta give rise to higher SNR images.
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spelling mmu-25052011-08-22T02:59:55Z http://shdl.mmu.edu.my/2505/ Effect of shot noise and secondary emission noise in scanning electron microscope images Sim,, KS Phang, , JCH Thong, , JTL TA Engineering (General). Civil engineering (General) The effect of shot noise and emission noise due to materials that have different emission properties was simulated. Local variations in emission properties affect the overall signal-to-noise ratio (SNR) value of the scanning electron microscope image. In the case in which emission noise is assumed to be absent, the image SNRs for silicon and gold on a black background are identical. This is because only shot noise in the primary beam affects the SNRs, irrespective of the assumed noiseless secondary electron emission or backscattered electron emission processes. The addition of secondary emission noise degrades the SNR. Materials with higher secondary electron yield and backscattering electron yield give rise to higher SNR. For images formed from two types of material, the contrast of the image is lower. The reduction in image signal reduces the overall image SNR. As expected, large differences in delta or eta give rise to higher SNR images. 2004-01 Article NonPeerReviewed Sim,, KS and Phang, , JCH and Thong, , JTL (2004) Effect of shot noise and secondary emission noise in scanning electron microscope images. SCANNING, 26 (1). pp. 36-40. ISSN 0161-0457
spellingShingle TA Engineering (General). Civil engineering (General)
Sim,, KS
Phang, , JCH
Thong, , JTL
Effect of shot noise and secondary emission noise in scanning electron microscope images
title Effect of shot noise and secondary emission noise in scanning electron microscope images
title_full Effect of shot noise and secondary emission noise in scanning electron microscope images
title_fullStr Effect of shot noise and secondary emission noise in scanning electron microscope images
title_full_unstemmed Effect of shot noise and secondary emission noise in scanning electron microscope images
title_short Effect of shot noise and secondary emission noise in scanning electron microscope images
title_sort effect of shot noise and secondary emission noise in scanning electron microscope images
topic TA Engineering (General). Civil engineering (General)
url http://shdl.mmu.edu.my/2505/