Lee, W. P., Teh, E. P., Yow, H. K., Choong, C. L., & Tou, T. Y. (2004). Polysilicon Encapsulation Gettering with Electric-Field-Enhanced Isothermal Annealing for Copper Impurities in Bulk Silicon.
Chicago Style (17th ed.) CitationLee, W. P., E. P. Teh, H. K. Yow, C. L. Choong, and T. Y. Tou. Polysilicon Encapsulation Gettering with Electric-Field-Enhanced Isothermal Annealing for Copper Impurities in Bulk Silicon. 2004.
MLA (9th ed.) CitationLee, W. P., et al. Polysilicon Encapsulation Gettering with Electric-Field-Enhanced Isothermal Annealing for Copper Impurities in Bulk Silicon. 2004.
Warning: These citations may not always be 100% accurate.