Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers

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Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers

Surface analyses by atomic force microscopy and field-emission scanning electron microscopy have revealed new shape of truncated voids, commonly known as crystal-originated-particles (COPs), that appear as kite-shaped pits with two (111) planes and two non-(111) planes in twin and triplet clusters,...

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Bibliographic Details
Main Authors:	Lee, W. P., Yow, H. K., Tou, T. Y.
Format:	Article
Published:	2004
Subjects:	Q Science (General)
Online Access:	http://shdl.mmu.edu.my/2493/

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