Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers
Surface analyses by atomic force microscopy and field-emission scanning electron microscopy have revealed new shape of truncated voids, commonly known as crystal-originated-particles (COPs), that appear as kite-shaped pits with two (111) planes and two non-(111) planes in twin and triplet clusters,...
| Main Authors: | , , |
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| Format: | Article |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2493/ |