Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers
Surface analyses by atomic force microscopy and field-emission scanning electron microscopy have revealed new shape of truncated voids, commonly known as crystal-originated-particles (COPs), that appear as kite-shaped pits with two (111) planes and two non-(111) planes in twin and triplet clusters,...
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| Format: | Article |
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2004
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| Online Access: | http://shdl.mmu.edu.my/2493/ |
| _version_ | 1848790069580660736 |
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| author | Lee, W. P. Yow, H. K. Tou, T. Y. |
| author_facet | Lee, W. P. Yow, H. K. Tou, T. Y. |
| author_sort | Lee, W. P. |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | Surface analyses by atomic force microscopy and field-emission scanning electron microscopy have revealed new shape of truncated voids, commonly known as crystal-originated-particles (COPs), that appear as kite-shaped pits with two (111) planes and two non-(111) planes in twin and triplet clusters, when viewed from the surface plane of nitrogen-doped Czochralski (CZ)-grown silicon (100) wafers. Also, the detection of higher number density but smaller size for these COPs indicates that the presence of nitrogen during CZ-growth of silicon crystals has strong influence on the size and density of COPs. (C) 2004 The Electrochemical Society. |
| first_indexed | 2025-11-14T18:06:45Z |
| format | Article |
| id | mmu-2493 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:06:45Z |
| publishDate | 2004 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-24932011-08-22T02:28:13Z http://shdl.mmu.edu.my/2493/ Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers Lee, W. P. Yow, H. K. Tou, T. Y. Q Science (General) Surface analyses by atomic force microscopy and field-emission scanning electron microscopy have revealed new shape of truncated voids, commonly known as crystal-originated-particles (COPs), that appear as kite-shaped pits with two (111) planes and two non-(111) planes in twin and triplet clusters, when viewed from the surface plane of nitrogen-doped Czochralski (CZ)-grown silicon (100) wafers. Also, the detection of higher number density but smaller size for these COPs indicates that the presence of nitrogen during CZ-growth of silicon crystals has strong influence on the size and density of COPs. (C) 2004 The Electrochemical Society. 2004 Article NonPeerReviewed Lee, W. P. and Yow, H. K. and Tou, T. Y. (2004) Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers. Electrochemical and Solid-State Letters, 7 (11). G282-G285. ISSN 10990062 http://dx.doi.org/10.1149/1.1808093 doi:10.1149/1.1808093 doi:10.1149/1.1808093 |
| spellingShingle | Q Science (General) Lee, W. P. Yow, H. K. Tou, T. Y. Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers |
| title | Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers |
| title_full | Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers |
| title_fullStr | Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers |
| title_full_unstemmed | Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers |
| title_short | Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers |
| title_sort | detection of kite-shaped cops in nitrogen-doped czochralski-grown silicon wafers |
| topic | Q Science (General) |
| url | http://shdl.mmu.edu.my/2493/ http://shdl.mmu.edu.my/2493/ http://shdl.mmu.edu.my/2493/ |