Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope

Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope

Dark-field optical scattering technique is adopted in a surface defect detection system (DDS) to allow an efficient and cost-effective detection and size determination of the crystal originated "particles" (COPs) on polished silicon wafer surface before atomic force microscope (AFM) measur...

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Bibliographic Details
Main Authors: Lee, W.-P., Yow, H.-K., Tou, T.-Y.
Format: Article
Language:English
Published: 2004
Subjects:
TA Engineering (General). Civil engineering (General)
Online Access:http://shdl.mmu.edu.my/2462/
http://shdl.mmu.edu.my/2462/1/1726.pdf

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