Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope
Dark-field optical scattering technique is adopted in a surface defect detection system (DDS) to allow an efficient and cost-effective detection and size determination of the crystal originated "particles" (COPs) on polished silicon wafer surface before atomic force microscope (AFM) measur...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2004
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2462/ http://shdl.mmu.edu.my/2462/1/1726.pdf |