APA (7th ed.) Citation

Lee, W., Yow, H., & Tou, T. (2004). Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope.

Chicago Style (17th ed.) Citation

Lee, W.-P, H.-K Yow, and T.-Y Tou. Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope. 2004.

MLA (9th ed.) Citation

Lee, W.-P, et al. Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope. 2004.