Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS

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Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS

A surface particle localization system based on oblique angle dark field optical scattering has been incorporated into time-of-flight secondary ion mass spectrometry. (TOF-SIMS) In this design, oblique incident laser light would be scattered to all directions by surface particles on silicon wafer an...

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Bibliographic Details
Main Authors:	Lee, Wah-Pheng, Koh, Song-Foo, Yow, Ho-Kwang, Tou, Teck-Yong
Format:	Article
Published:	2005
Subjects:	QD Chemistry
Online Access:	http://shdl.mmu.edu.my/2343/

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