Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS
A surface particle localization system based on oblique angle dark field optical scattering has been incorporated into time-of-flight secondary ion mass spectrometry. (TOF-SIMS) In this design, oblique incident laser light would be scattered to all directions by surface particles on silicon wafer an...
| Main Authors: | , , , |
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| Format: | Article |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2343/ |