Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS
A surface particle localization system based on oblique angle dark field optical scattering has been incorporated into time-of-flight secondary ion mass spectrometry. (TOF-SIMS) In this design, oblique incident laser light would be scattered to all directions by surface particles on silicon wafer an...
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| Format: | Article |
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2005
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| Online Access: | http://shdl.mmu.edu.my/2343/ |
| _version_ | 1848790030413201408 |
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| author | Lee, Wah-Pheng Koh, Song-Foo Yow, Ho-Kwang Tou, Teck-Yong |
| author_facet | Lee, Wah-Pheng Koh, Song-Foo Yow, Ho-Kwang Tou, Teck-Yong |
| author_sort | Lee, Wah-Pheng |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | A surface particle localization system based on oblique angle dark field optical scattering has been incorporated into time-of-flight secondary ion mass spectrometry. (TOF-SIMS) In this design, oblique incident laser light would be scattered to all directions by surface particles on silicon wafer and be collected at oblique angle to determine the x-y coordinate of the particle detected. This fast and nondestructive technique is an effective alternative to the standard method for imaging and localization of surface particles using primary ion bombardment by TOF-SIMS which might result in the alteration or loss of physiochemical information from the surface particles. (C) 2005 The Electrochemical Society. |
| first_indexed | 2025-11-14T18:06:08Z |
| format | Article |
| id | mmu-2343 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:06:08Z |
| publishDate | 2005 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-23432011-08-23T07:27:00Z http://shdl.mmu.edu.my/2343/ Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS Lee, Wah-Pheng Koh, Song-Foo Yow, Ho-Kwang Tou, Teck-Yong QD Chemistry A surface particle localization system based on oblique angle dark field optical scattering has been incorporated into time-of-flight secondary ion mass spectrometry. (TOF-SIMS) In this design, oblique incident laser light would be scattered to all directions by surface particles on silicon wafer and be collected at oblique angle to determine the x-y coordinate of the particle detected. This fast and nondestructive technique is an effective alternative to the standard method for imaging and localization of surface particles using primary ion bombardment by TOF-SIMS which might result in the alteration or loss of physiochemical information from the surface particles. (C) 2005 The Electrochemical Society. 2005 Article NonPeerReviewed Lee, Wah-Pheng and Koh, Song-Foo and Yow, Ho-Kwang and Tou, Teck-Yong (2005) Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS. Electrochemical and Solid-State Letters, 8 (3). J5-J9. ISSN 10990062 http://dx.doi.org/10.1149/1.1857691 doi:10.1149/1.1857691 doi:10.1149/1.1857691 |
| spellingShingle | QD Chemistry Lee, Wah-Pheng Koh, Song-Foo Yow, Ho-Kwang Tou, Teck-Yong Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS |
| title | Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS |
| title_full | Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS |
| title_fullStr | Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS |
| title_full_unstemmed | Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS |
| title_short | Nondestructive Localization of Surface Particles for Elemental Compositional Analysis by TOF-SIMS |
| title_sort | nondestructive localization of surface particles for elemental compositional analysis by tof-sims |
| topic | QD Chemistry |
| url | http://shdl.mmu.edu.my/2343/ http://shdl.mmu.edu.my/2343/ http://shdl.mmu.edu.my/2343/ |