Properties of ITO on plastics and glass by Nd:YAG laser deposition at 355 and 532nm
Indium tin oxide (ITO) was deposited on polycarbonate (PC), polyethylene terephthalate (PET) and glass substrates at room temperature and in a low-pressure oxygen environment by a pulsed Nd:YAG laser at 355 and 532 nm. The ITO film resistivity varied with the oxygen pressure, which achieved the lowe...
| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
PERGAMON-ELSEVIER SCIENCE LTD
2008
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2283/ |