Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser
Diamond-like carbon (DLC) films were deposited on p-type silicon (Si-100) substrates by using a pulsed Nd:YAG laser for the ablation of a pyrolytic graphite target at a background pressure of 10(-6) Torr. For a fixed distance of 3 cm between the target and substrate, samples of DLC/Si heterojunction...
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| Format: | Article |
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PERGAMON-ELSEVIER SCIENCE LTD
2008
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| Online Access: | http://shdl.mmu.edu.my/2282/ |
| _version_ | 1848790013962092544 |
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| author | YAP, S TOU, T |
| author_facet | YAP, S TOU, T |
| author_sort | YAP, S |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | Diamond-like carbon (DLC) films were deposited on p-type silicon (Si-100) substrates by using a pulsed Nd:YAG laser for the ablation of a pyrolytic graphite target at a background pressure of 10(-6) Torr. For a fixed distance of 3 cm between the target and substrate, samples of DLC/Si heterojunction were prepared for two different laser wavelengths of 355 nm and 1064 nm. All DLC films showed typical D and G bands in their Raman spectra. DLC films were also deposited on glass substrates for resistivity measurement by four-point probe. The electrical properties for DLC/Si heterojunctions were analyzed cutrent-voltage measurement at room temperature in the dark and also under illumination. The dependencies of the electrical characteristics on the depositing parameters were discussed. (C) 2008 Elsevier Ltd. All rights reserved. |
| first_indexed | 2025-11-14T18:05:52Z |
| format | Article |
| id | mmu-2282 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:05:52Z |
| publishDate | 2008 |
| publisher | PERGAMON-ELSEVIER SCIENCE LTD |
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| spelling | mmu-22822011-09-09T03:31:29Z http://shdl.mmu.edu.my/2282/ Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser YAP, S TOU, T QA75.5-76.95 Electronic computers. Computer science QC Physics Diamond-like carbon (DLC) films were deposited on p-type silicon (Si-100) substrates by using a pulsed Nd:YAG laser for the ablation of a pyrolytic graphite target at a background pressure of 10(-6) Torr. For a fixed distance of 3 cm between the target and substrate, samples of DLC/Si heterojunction were prepared for two different laser wavelengths of 355 nm and 1064 nm. All DLC films showed typical D and G bands in their Raman spectra. DLC films were also deposited on glass substrates for resistivity measurement by four-point probe. The electrical properties for DLC/Si heterojunctions were analyzed cutrent-voltage measurement at room temperature in the dark and also under illumination. The dependencies of the electrical characteristics on the depositing parameters were discussed. (C) 2008 Elsevier Ltd. All rights reserved. PERGAMON-ELSEVIER SCIENCE LTD 2008-08 Article NonPeerReviewed YAP, S and TOU, T (2008) Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser. Vacuum, 82 (12). pp. 1449-1451. ISSN 0042207X http://dx.doi.org/10.1016/j.vacuum.2008.03.012 doi:10.1016/j.vacuum.2008.03.012 doi:10.1016/j.vacuum.2008.03.012 |
| spellingShingle | QA75.5-76.95 Electronic computers. Computer science QC Physics YAP, S TOU, T Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser |
| title | Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser |
| title_full | Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser |
| title_fullStr | Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser |
| title_full_unstemmed | Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser |
| title_short | Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser |
| title_sort | investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed nd:yag laser |
| topic | QA75.5-76.95 Electronic computers. Computer science QC Physics |
| url | http://shdl.mmu.edu.my/2282/ http://shdl.mmu.edu.my/2282/ http://shdl.mmu.edu.my/2282/ |