Investigation of diamond-like carbon/silicon heterojunctions deposited by pulsed Nd:YAG laser
Diamond-like carbon (DLC) films were deposited on p-type silicon (Si-100) substrates by using a pulsed Nd:YAG laser for the ablation of a pyrolytic graphite target at a background pressure of 10(-6) Torr. For a fixed distance of 3 cm between the target and substrate, samples of DLC/Si heterojunction...
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| Format: | Article |
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PERGAMON-ELSEVIER SCIENCE LTD
2008
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| Online Access: | http://shdl.mmu.edu.my/2282/ |