New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM
The quality of an image generated by a scanning electron microscope is dependent on secondary emission, which is a strong function of surface condition. Thus, empirical formulae and available databases are unable to take into account actual metrology conditions. This paper introduces a simple and re...
| Main Authors: | , |
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| Format: | Article |
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2005
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| Online Access: | http://shdl.mmu.edu.my/2256/ |
| _version_ | 1848790006906224640 |
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| author | SIM, K. S. WHITE, J. D. |
| author_facet | SIM, K. S. WHITE, J. D. |
| author_sort | SIM, K. S. |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | The quality of an image generated by a scanning electron microscope is dependent on secondary emission, which is a strong function of surface condition. Thus, empirical formulae and available databases are unable to take into account actual metrology conditions. This paper introduces a simple and reliable measurement technique to measure secondary electron yield (delta) and backscattered electron yield (eta) that is suitable for in-situ measurements on a specimen immediately prior to imaging. The reliability of this technique is validated on a number of homogenous surfaces. The measured electron yields are shown to be within the range of published data and the calculated signal-to-noise ratio compares favourably with that estimated from the image. |
| first_indexed | 2025-11-14T18:05:45Z |
| format | Article |
| id | mmu-2256 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:05:45Z |
| publishDate | 2005 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-22562011-09-12T02:27:39Z http://shdl.mmu.edu.my/2256/ New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM SIM, K. S. WHITE, J. D. TA Engineering (General). Civil engineering (General) The quality of an image generated by a scanning electron microscope is dependent on secondary emission, which is a strong function of surface condition. Thus, empirical formulae and available databases are unable to take into account actual metrology conditions. This paper introduces a simple and reliable measurement technique to measure secondary electron yield (delta) and backscattered electron yield (eta) that is suitable for in-situ measurements on a specimen immediately prior to imaging. The reliability of this technique is validated on a number of homogenous surfaces. The measured electron yields are shown to be within the range of published data and the calculated signal-to-noise ratio compares favourably with that estimated from the image. 2005-03 Article NonPeerReviewed SIM, K. S. and WHITE, J. D. (2005) New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM. Journal of Microscopy, 217 (3). pp. 235-240. ISSN 0022-2720 http://dx.doi.org/10.1111/j.1365-2818.2005.01448.x doi:10.1111/j.1365-2818.2005.01448.x doi:10.1111/j.1365-2818.2005.01448.x |
| spellingShingle | TA Engineering (General). Civil engineering (General) SIM, K. S. WHITE, J. D. New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM |
| title | New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM |
| title_full | New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM |
| title_fullStr | New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM |
| title_full_unstemmed | New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM |
| title_short | New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM |
| title_sort | new technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a sem |
| topic | TA Engineering (General). Civil engineering (General) |
| url | http://shdl.mmu.edu.my/2256/ http://shdl.mmu.edu.my/2256/ http://shdl.mmu.edu.my/2256/ |