New technique for in-situ measurement of backscattered and secondary electron yields for the calculation of signal-to-noise ratio in a SEM
The quality of an image generated by a scanning electron microscope is dependent on secondary emission, which is a strong function of surface condition. Thus, empirical formulae and available databases are unable to take into account actual metrology conditions. This paper introduces a simple and re...
| Main Authors: | , |
|---|---|
| Format: | Article |
| Published: |
2005
|
| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2256/ |