Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field
Iron impurities in bulk silicon are found to getter efficiently at the polysilicon layer by an electric field during isothermal annealing. Experimental results show that iron concentration at the polysilicon layer increases to the level that becomes detectable by total reflection x-ray fluorescence...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2212/ http://shdl.mmu.edu.my/2212/1/1525.pdf |
| _version_ | 1848789994975526912 |
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| author | Lee, W. P. Teh, E. P. Yow, H. K. Choong, C. L. Tou, T. Y. |
| author_facet | Lee, W. P. Teh, E. P. Yow, H. K. Choong, C. L. Tou, T. Y. |
| author_sort | Lee, W. P. |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | Iron impurities in bulk silicon are found to getter efficiently at the polysilicon layer by an electric field during isothermal annealing. Experimental results show that iron concentration at the polysilicon layer increases to the level that becomes detectable by total reflection x-ray fluorescence (TXRF) spectroscopy. The improved gettering efficiency for iron is attributed mainly to the directional drift of ionic iron interstitials toward the polysilicon gettering sites, under the influence of the applied potential gradient, thus presenting a more effective method for reducing the iron content in silicon. |
| first_indexed | 2025-11-14T18:05:34Z |
| format | Article |
| id | mmu-2212 |
| institution | Multimedia University |
| institution_category | Local University |
| language | English |
| last_indexed | 2025-11-14T18:05:34Z |
| publishDate | 2005 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-22122011-08-12T01:30:33Z http://shdl.mmu.edu.my/2212/ Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field Lee, W. P. Teh, E. P. Yow, H. K. Choong, C. L. Tou, T. Y. TA Engineering (General). Civil engineering (General) Iron impurities in bulk silicon are found to getter efficiently at the polysilicon layer by an electric field during isothermal annealing. Experimental results show that iron concentration at the polysilicon layer increases to the level that becomes detectable by total reflection x-ray fluorescence (TXRF) spectroscopy. The improved gettering efficiency for iron is attributed mainly to the directional drift of ionic iron interstitials toward the polysilicon gettering sites, under the influence of the applied potential gradient, thus presenting a more effective method for reducing the iron content in silicon. 2005-07 Article NonPeerReviewed application/pdf en http://shdl.mmu.edu.my/2212/1/1525.pdf Lee, W. P. and Teh, E. P. and Yow, H. K. and Choong, C. L. and Tou, T. Y. (2005) Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field. Journal of Electronic Materials, 34 (7). L25-29. ISSN 0361-5235 http://dx.doi.org/10.1007/s11664-005-0101-x doi:10.1007/s11664-005-0101-x doi:10.1007/s11664-005-0101-x |
| spellingShingle | TA Engineering (General). Civil engineering (General) Lee, W. P. Teh, E. P. Yow, H. K. Choong, C. L. Tou, T. Y. Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| title | Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| title_full | Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| title_fullStr | Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| title_full_unstemmed | Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| title_short | Enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| title_sort | enhanced gettering of iron impurities in bulk silicon by using external direct current electric field |
| topic | TA Engineering (General). Civil engineering (General) |
| url | http://shdl.mmu.edu.my/2212/ http://shdl.mmu.edu.my/2212/ http://shdl.mmu.edu.my/2212/ http://shdl.mmu.edu.my/2212/1/1525.pdf |