Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers

QR Code

Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers

Grown-in crystal-originated particles (COPs) on the surface of silicon nitride-doped Czochralski (CZ)-grown silicon wafers were characterized using atomic force microscopy and scanning electron microscopy. These nanometer-scale COPs are categorized into kite-shaped, parallelepiped- plate and needle-...

Full description

Bibliographic Details
Main Authors:	Lee, W. P., Yow, H. K., Tou, T. Y.
Format:	Article
Published:	2006
Subjects:	QD Chemistry
Online Access:	http://shdl.mmu.edu.my/2078/

Similar Items

Detection of Kite-Shaped COPs in Nitrogen-Doped Czochralski-Grown Silicon Wafers
by: Lee, W. P., et al.
Published: (2004)

Optical Scattering Detection And Characterisation Of Crystal Originated Particles In Czochralski-Grown Silicon Wafers
by: Lee , Wah Pheng
Published: (2005)

Efficient Detection and Size Determination of Crystal Originated “Particles” (COPs) on Silicon Wafer Surface Using Optical Scattering Technique Integrated to an Atomic Force Microscope
by: Lee, W.-P., et al.
Published: (2004)

Analysis of Atomic Force Microscopy Images of Crystal Originated “Particles” on Silicon Wafers Treated with NH4OH:H2O2:H2O Solution
by: Lee, W. P., et al.
Published: (2001)

Characterization of polished silicon wafer / by Rajan Subramaniam.
by: Subramaniam, Rajan
Published: (2003)

Production, characterization and application of silicon-on-sapphire wafers
by: Pramanik, Alokesh, et al.
Published: (2010)

High speed end milling of single crystal silicon wafer
by: Amin, A. K. M. Nurul, et al.
Published: (2011)

Scratch Fracture of Polycrystalline Silicon Wafers
by: Borrero-Lõpez, O., et al.
Published: (2015)

Experimental laser-machining of silicon wafer
by: Lau, Zhen Chyen
Published: (2010)

Analysis of silicon nanowires synthesized from SIO on silicon wafer substrate
by: Hamidinezhad, Habib, et al.
Published: (2009)

Recent nanofabrication of silicon dioxide on silicon wafer using AFM operated at low temperature
by: Sutjipto, Agus Geter Edy, et al.
Published: (2011)

Synthesis and characterization of nickel-iron-silicon nitride nanocomposite
by: Marita, Yusrini, et al.
Published: (2010)

Synthesis and characterization of nickel iron–silicon nitride nanocomposite
by: Yaacob, Iskandar Idris
Published: (2011)

Etching performance of silicon wafers with redesigned etching drum
by: Dolah, Rozzeta
Published: (2006)

Computer Simulations Of Void And Oxide Precipitate In Hydrogen-Annealed Silicon Wafer
by: Lee, Beng Gee
Published: (2004)

Growth And Characterization Of Gallium Nitride Films On Porous Silicon Substrate
by: Samsudin, Muhammad Esmed Alif
Published: (2016)

Synthesis Of Silicon-Based Nanostructures By Chemical Vapour Growth On Silicon Wafer And From Pyrolysis Of Oil Palm Fibres
by: Chiew , Yi Ling
Published: (2012)

Characterization of defects generated by copper electrochemical plating process on silicon wafers / Yasmin Abdul Wahab
by: Abdul Wahab, Yasmin
Published: (2008)

Effect of etching as pre-treatment for electroless copper plating on silicon wafer
by: Mior Shahidina, Shazatul Akmaliah, et al.
Published: (2017)

Enhancement of thermal and mechanical stabilities of silicon doped titanium nitride coating by manipulation of sputtering conditions
by: Mohammadpour, Ehsan, et al.
Published: (2022)

Studies of UV-irradiation effects on the recombination lifetime of silicon wafer / by Lee Wah Pheng.
by: Lee, Wah Pheng
Published: (1996)

Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
by: Choong, Chwee Lin
Published: (2006)

Quality of Cu Film electrodeposited on silicon wafer using different current densities
by: Mridha, Shahjahan
Published: (2011)

Quality of copper film electroplated on silicon wafer using different current densities
by: Mridha, Shahjahan
Published: (2011)

Enhanced titanium dioxide photocatalyst embolized on micropores silicon wafer: An experimental approach
by: Basheer, Esmail Abdullah Mohammed, et al.
Published: (2020)

Comparison Study Of Hydrothermally Grown ZnO Nanorods On Untreated Silicon And Black Silicon Substrates
by: Mohammad, Sabah M., et al.
Published: (2020)

Comparison Study Of Hydrothermally Grown ZnO Nanorods On Untreated Silicon And Black Silicon Substrates
by: Mohammad, Sabah M., et al.
Published: (2020)

Towards achieving nanofinish on silicon (Si) wafer by μ-wire electro-discharge machining
by: Jarin, Sams, et al.
Published: (2018)

Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers
by: Kang, Ban Hong
Published: (2006)

Oxidation-induced stacking fault in (100) and (111) silicon wafers / Liang Mei Keat.
by: Liang, Mei Keat
Published: (2002)

Electrochemical Disposition of Titanium Dioxide Photocatalyst on Micropores Silicon Wafer for Water Treatment Application
by: Basheer, Esmail Abdullah Mohammed, et al.
Published: (2020)

Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
by: Jasni, Farah Anis
Published: (2009)

Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment
by: Wong, Yew Hoong
Published: (2012)

Improving μ-wire electro-discharge machining operation of polished silicon wafer by conductive coating
by: Rasheed, Aous Naji, et al.
Published: (2014)

Enhancing μ-wedming (wire electro-discharge machining) of polished silicon wafer by conductive coating
by: Rasheed, Aous Naji, et al.
Published: (2014)

Defect Detection And Classification Of Silicon Solar Wafer Featuring Nir Imaging And Improved Niblack Segmentation
by: Mahdavipour, Zeinab
Published: (2016)

Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
by: Amirhoseiny, Maryam
Published: (2013)

Free space microwave characterization of silicon wafers for microelectronic applications / Zaiki Awang, Deepak Kumar Ghodgaonkar and Noor Hasimah Baba
by: Awang, Zaiki, et al.
Published: (2005)

Synthesis and characterization of silicon nanorod on n-type porous silicon
by: Behzad, Kasra, et al.
Published: (2016)

Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique
by: Majeed, Uzair
Published: (2016)