Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers
Grown-in crystal-originated particles (COPs) on the surface of silicon nitride-doped Czochralski (CZ)-grown silicon wafers were characterized using atomic force microscopy and scanning electron microscopy. These nanometer-scale COPs are categorized into kite-shaped, parallelepiped- plate and needle-...
| Main Authors: | , , |
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| Format: | Article |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/2078/ |