APA (7th ed.) Citation

Lee, W. P., Yow, H. K., & Tou, T. Y. (2006). Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers.

Chicago Style (17th ed.) Citation

Lee, W. P., H. K. Yow, and T. Y. Tou. Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers. 2006.

MLA (9th ed.) Citation

Lee, W. P., et al. Characterization of Crystal-Originated Particles in Silicon Nitride Doped, CZ-Grown Silicon Wafers. 2006.

Warning: These citations may not always be 100% accurate.