Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application

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Simulated Dielectric Characteristics of Pt/BST/Ni-Fe/Cu Multilayer Capacitor Stack for Storage Application

In this simulation research work, the metal-composite-metal (MCM) multilayer capacitor structure [Pt/BST/Ni-Fe/Cu] is proposed with Barium Strontium Titanate (BST) oxide material as the capacitor dielectric material for DRAM with permalloy Nickel-Ferrous (Ni-Fe) coated Copper (Cu) as the bottom cond...

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Bibliographic Details
Main Authors:	Balachandran, R, Yow, HK, Manickam, RM, Saaminathan, V
Format:	Conference or Workshop Item
Published:	2006
Subjects:	TA Engineering (General). Civil engineering (General)
Online Access:	http://shdl.mmu.edu.my/2051/

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