Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer

In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.

Bibliographic Details
Main Author:	Choong, Chwee Lin
Format:	Thesis
Published:	2006
Subjects:	TK7800-8360 Electronics
Online Access:	http://shdl.mmu.edu.my/1119/

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