Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.
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| Format: | Thesis |
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2006
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| Online Access: | http://shdl.mmu.edu.my/1119/ |