Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer
In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations.
| Main Author: | |
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| Format: | Thesis |
| Published: |
2006
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| Subjects: | |
| Online Access: | http://shdl.mmu.edu.my/1119/ |
| _version_ | 1848789698328133632 |
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| author | Choong, Chwee Lin |
| author_facet | Choong, Chwee Lin |
| author_sort | Choong, Chwee Lin |
| building | MMU Institutional Repository |
| collection | Online Access |
| description | In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations. |
| first_indexed | 2025-11-14T18:00:51Z |
| format | Thesis |
| id | mmu-1119 |
| institution | Multimedia University |
| institution_category | Local University |
| last_indexed | 2025-11-14T18:00:51Z |
| publishDate | 2006 |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | mmu-11192010-08-23T03:51:31Z http://shdl.mmu.edu.my/1119/ Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer Choong, Chwee Lin TK7800-8360 Electronics In this project, a parametric study was conducted on the performance of polysilicon coating for the gettering of copper impurities in silicon wafers of different dopants and concentrations. 2006-05 Thesis NonPeerReviewed Choong, Chwee Lin (2006) Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer. Masters thesis, Multimedia University. http://myto.perpun.net.my/metoalogin/logina.php |
| spellingShingle | TK7800-8360 Electronics Choong, Chwee Lin Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer |
| title | Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer |
| title_full | Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer |
| title_fullStr | Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer |
| title_full_unstemmed | Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer |
| title_short | Effect Of Temperature And Electric Field On Polysilicon Gettering Of Copper Impurities In Silicon Wafer |
| title_sort | effect of temperature and electric field on polysilicon gettering of copper impurities in silicon wafer |
| topic | TK7800-8360 Electronics |
| url | http://shdl.mmu.edu.my/1119/ http://shdl.mmu.edu.my/1119/ |