Characterization of electroplated permalloy film on microstructure for Bio-MEMS application

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Characterization of electroplated permalloy film on microstructure for Bio-MEMS application

Thick films (approximately 120microns) of microstructure permalloy were electrodeposited by a direct DC electroplating process for 3 hours. The bath contained mixed baths of sulfate and chloride, a buffer and a stress reducing agents. The bath pH was 3.3 . The voltage and current value were con...

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Bibliographic Details
Main Authors:	Abdul Rani, Nabila Syafiqa, Ibrahim, Siti Noorjannah, Zahangir, Musanna, Abdul Malik, Noreha
Format:	Proceeding Paper
Language:	English English
Published:	Institute of Electrical and Electronics Engineers Inc. 2019
Subjects:	TK Electrical engineering. Electronics Nuclear engineering
Online Access:	http://irep.iium.edu.my/79703/ http://irep.iium.edu.my/79703/13/79703_Characterization%20of%20Electroplated%20Permalloy%20Film%20_baru.pdf http://irep.iium.edu.my/79703/2/79703_Characterization%20of%20Electroplated_scopus.pdf

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