Characterization of electroplated permalloy film on microstructure for Bio-MEMS application
Thick films (approximately 120microns) of microstructure permalloy were electrodeposited by a direct DC electroplating process for 3 hours. The bath contained mixed baths of sulfate and chloride, a buffer and a stress reducing agents. The bath pH was 3.3 . The voltage and current value were con...
| Main Authors: | , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2019
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| Subjects: | |
| Online Access: | http://irep.iium.edu.my/79703/ http://irep.iium.edu.my/79703/13/79703_Characterization%20of%20Electroplated%20Permalloy%20Film%20_baru.pdf http://irep.iium.edu.my/79703/2/79703_Characterization%20of%20Electroplated_scopus.pdf |