Characterization of electroplated permalloy film on microstructure for Bio-MEMS application
Thick films (approximately 120microns) of microstructure permalloy were electrodeposited by a direct DC electroplating process for 3 hours. The bath contained mixed baths of sulfate and chloride, a buffer and a stress reducing agents. The bath pH was 3.3 . The voltage and current value were con...
| Main Authors: | , , , |
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| Format: | Proceeding Paper |
| Language: | English English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2019
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| Online Access: | http://irep.iium.edu.my/79703/ http://irep.iium.edu.my/79703/13/79703_Characterization%20of%20Electroplated%20Permalloy%20Film%20_baru.pdf http://irep.iium.edu.my/79703/2/79703_Characterization%20of%20Electroplated_scopus.pdf |
| _version_ | 1848788821656731648 |
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| author | Abdul Rani, Nabila Syafiqa Ibrahim, Siti Noorjannah Zahangir, Musanna Abdul Malik, Noreha |
| author_facet | Abdul Rani, Nabila Syafiqa Ibrahim, Siti Noorjannah Zahangir, Musanna Abdul Malik, Noreha |
| author_sort | Abdul Rani, Nabila Syafiqa |
| building | IIUM Repository |
| collection | Online Access |
| description | Thick films (approximately 120microns) of
microstructure permalloy were electrodeposited by a direct DC
electroplating process for 3 hours. The bath contained mixed
baths of sulfate and chloride, a buffer and a stress reducing
agents. The bath pH was 3.3 . The voltage and current value
were controlled to get the desired thickness in uniform of
permalloy coatings. The permalloy is deposited on
microchannel with dimension of 80µm x 4500µm x 1840µm. A
negative photoresist of AZ125nXT was used to pattern the
microchannel by photolithography process. These
electrodeposition of Ni-Fe magnetic films can be utilized to
induce live cells manipulation such as separation of blood cells,
proteins, etc for Bio-MEMS application. Therefore, the
characterization study is important to be understand. Here, we
studied the effect of electroplating time to produce thick film of
permalloy on the surface morphology, scanning electron
microscopy, optical microscope, X-ray diffraction and energy
dispersive X-Ray. The thickness film increased due to the long
period of plating time with plating rate 0.55 µm/min with
ration of permalloy produced 86.08:13.92 wt% of nickel-iron. |
| first_indexed | 2025-11-14T17:46:55Z |
| format | Proceeding Paper |
| id | iium-79703 |
| institution | International Islamic University Malaysia |
| institution_category | Local University |
| language | English English |
| last_indexed | 2025-11-14T17:46:55Z |
| publishDate | 2019 |
| publisher | Institute of Electrical and Electronics Engineers Inc. |
| recordtype | eprints |
| repository_type | Digital Repository |
| spelling | iium-797032020-07-10T07:43:39Z http://irep.iium.edu.my/79703/ Characterization of electroplated permalloy film on microstructure for Bio-MEMS application Abdul Rani, Nabila Syafiqa Ibrahim, Siti Noorjannah Zahangir, Musanna Abdul Malik, Noreha TK Electrical engineering. Electronics Nuclear engineering Thick films (approximately 120microns) of microstructure permalloy were electrodeposited by a direct DC electroplating process for 3 hours. The bath contained mixed baths of sulfate and chloride, a buffer and a stress reducing agents. The bath pH was 3.3 . The voltage and current value were controlled to get the desired thickness in uniform of permalloy coatings. The permalloy is deposited on microchannel with dimension of 80µm x 4500µm x 1840µm. A negative photoresist of AZ125nXT was used to pattern the microchannel by photolithography process. These electrodeposition of Ni-Fe magnetic films can be utilized to induce live cells manipulation such as separation of blood cells, proteins, etc for Bio-MEMS application. Therefore, the characterization study is important to be understand. Here, we studied the effect of electroplating time to produce thick film of permalloy on the surface morphology, scanning electron microscopy, optical microscope, X-ray diffraction and energy dispersive X-Ray. The thickness film increased due to the long period of plating time with plating rate 0.55 µm/min with ration of permalloy produced 86.08:13.92 wt% of nickel-iron. Institute of Electrical and Electronics Engineers Inc. 2019-08 Proceeding Paper NonPeerReviewed application/pdf en http://irep.iium.edu.my/79703/13/79703_Characterization%20of%20Electroplated%20Permalloy%20Film%20_baru.pdf application/pdf en http://irep.iium.edu.my/79703/2/79703_Characterization%20of%20Electroplated_scopus.pdf Abdul Rani, Nabila Syafiqa and Ibrahim, Siti Noorjannah and Zahangir, Musanna and Abdul Malik, Noreha (2019) Characterization of electroplated permalloy film on microstructure for Bio-MEMS application. In: "2019 IEEE Regional Symposium on Micro and Nanoelectronics, RSM 2019", 21 - 23 Aug 2019, Genting Highland, Pahang. https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8943517 10.1109/RSM46715.2019.8943517 |
| spellingShingle | TK Electrical engineering. Electronics Nuclear engineering Abdul Rani, Nabila Syafiqa Ibrahim, Siti Noorjannah Zahangir, Musanna Abdul Malik, Noreha Characterization of electroplated permalloy film on microstructure for Bio-MEMS application |
| title | Characterization of electroplated permalloy film on microstructure for Bio-MEMS application |
| title_full | Characterization of electroplated permalloy film on microstructure for Bio-MEMS application |
| title_fullStr | Characterization of electroplated permalloy film on microstructure for Bio-MEMS application |
| title_full_unstemmed | Characterization of electroplated permalloy film on microstructure for Bio-MEMS application |
| title_short | Characterization of electroplated permalloy film on microstructure for Bio-MEMS application |
| title_sort | characterization of electroplated permalloy film on microstructure for bio-mems application |
| topic | TK Electrical engineering. Electronics Nuclear engineering |
| url | http://irep.iium.edu.my/79703/ http://irep.iium.edu.my/79703/ http://irep.iium.edu.my/79703/ http://irep.iium.edu.my/79703/13/79703_Characterization%20of%20Electroplated%20Permalloy%20Film%20_baru.pdf http://irep.iium.edu.my/79703/2/79703_Characterization%20of%20Electroplated_scopus.pdf |