Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas

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Finite element simulation of miniaturized ZnO/Si SAW sensor for rapid detection of dichloromethane gas

Air quality control is very crucial as poor air quality can lead to chronic respiratory organ diseases. Hence, detection of numerous toxic and hazardous gas is utmost significance. A low cost and high sensitivity gas sensor is crucial to monitor the excessive presence of the dangerous gas that can h...

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Bibliographic Details
Main Authors:	Mohamad Razali, Nur Fatin, Md Ralib, Aliza Aini, Saidin, Norazlina
Format:	Article
Language:	English English
Published:	2018
Subjects:	TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
Online Access:	http://irep.iium.edu.my/73440/ http://irep.iium.edu.my/73440/1/73440_Finite%20Element%20Simulation%20of%20Miniaturized_complete.pdf http://irep.iium.edu.my/73440/2/73440_Finite%20Element%20Simulation%20of%20Miniaturized_wos.pdf

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